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MEMS community chip
ISSS MEMS Community chip
Introduction:
What is a “Community Chip”?
Participating Institutes
- Anna University, Chennai
- Bengal Engineering and Science University, Shibpur
- Kurukshetra University, Kurukshetra
- Nitte Meenakshi Institute of Technology, Bengaluru
- Rajalakshmi Engineering College, Chennai
- SGS Institute of Technology and Science, Indore
Process: SOIMUMPs
- Number of Institutions participated: 8
- All MEMS devices were thermal actuator
This run was coordinated by Prof. K. J. Vinoy, Prof. G. K. Ananthasuresh, Dr. Samdudha Khan, Dr. Sudhanshu Shekhar from IISc and was sponsored by NPMASS.
Participating Institutes
- Varactor & Micromotor – NMIT
- Micromirror – Institute of Radiophysics and Electronics, University of Kolkata
- Gyroscope & Microheater – Rajalakshmi Engineering College
- Microgripper – Anna University
- Optical Coherence Waveguide – SGSITS
- Shunt-capacitance RF MEMS switch – BESU
Process: PolyMUMPs
- Number of Institutions participated: 6
This activity was coordinated by professors and research scholars from IISc (Prof. K J Vinoy, Prof. G. K. Ananthasuresh, Dr. Samdudha Khan, Dr. Sudhanshu Shekhar) along with professors from NMIT (Prof. S. L. Pinjare and Prof. Veda S. N.) and sponsored by NPMASS.
Participating Institutes
- Energy Harvester – Anna University, Chennai
- Microheater – Bengal Engineering and Science University, Shibpur
- Microphone – Nitte Meenakshi Institute of Technology, Bengaluru
- Accelerometer – Rajalakshmi Engineering College, Chennai
- RF Switch – SSN, Chennai
- Bidirectional Actuator – Kurukshetra University, Kurukshetra
- Resonator – NIT, Trichy
- Thermal Actuator – Basaveshwara Engineering College, Bagalkot
Process: SOIMUMPs
- Number of Institutions participated: 8
This activity was coordinated by professors and research scholars from IISc (Prof. K J Vinoy, Prof. G. K. Ananthasuresh, Dr. Samdudha Khan, Dr. Sudhanshu Shekhar) along with professors from NMIT (Prof. S. L. Pinjare and Prof. Veda S. N.) and sponsored by NPMASS.
Participating Institutes
- Accelerometer and Thermal actuator – Nitte Meenakshi Institute of Technology
- Heatuator – BMS College of Engineering
- Microgripper – SJC Institute of Technology
- Inertial sensor – Vignan University
- Accelerometer – NMAM Institute of Technology
- Electrostatic Actuator – MS College of Engineering
- Microfluidic channels – SSN College of Engineering
- Directional Microphone – Vidya Vikas Institute of Engineering and Technology
Process: SOIMUMPs
- Number of Institutions participated: 8
Prof. G. K. Ananthasuresh and Dr. Sudhanshu Shekhar along with Prof. Veda S. N. coordinated the whole activity under the umbrella of the Institute of Smart Structures and System (ISSS). Participating institutes financed the fabrication cost of this run.
ISSS’s Role in community chip
Future activities
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